Non-Invasive, Clamp-On RF Detector Delivers High-Speed Arc Detection and Clean End Point Control for higher yields and reduced Cost of Ownership...
Easy retrofit to existing tool set and drop-in replacement for OES-based instrument for endpoint control.
High-speed collection for arc detection.
Eliminates chamber clean under- and over-etching, increasing uptime and reducing cost of gas usage and materials.
Integrated management with FabGuard...
Non- Invasive, high speed, DC arc dection for real-time process control...
Software to the tool through FabGuard Sensor Integration and Analysis System.
Custom cables connect to most DC generators.
Detects arcs with pre-defined analysis tools...
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